9th International Conference on Reactive Plasmas/68th Annual Gaseous Electronics Conference/33rd Symposium on Plasma ProcessingICRP-9/GEC-68/SPP-33

Monday–Friday, October 12–16, 2015; Honolulu, Hawaii

 

Atmospheric Pressure Micro-Thermal-Plasma-Jet Crystallization of Amorphous Silicon Strips for High-Performance Thin Film Transistor Fabrication

 

Atmospheric Pressure Thermal-Plasma-Jet Oxidation of 4H-SiC