第30回プラズマプロセシング研究会 30th Symposium on Plasma Processing [SPP-30]

アクトシティ浜松・研修交流センター 2013年1月21日~23日

“Grain Growth Control by Micro Thermal Plasma Jet Irradiation to Amorphous Silicon Strips and Improvement in Characteristic Variability of Thin Film Transistors”

  Seiji Morisaki, Shohei Hayashi, Yuji Fujita1, and Seiichiro Higashi

 

 

 

 

 

 

The 9th International Thin-Film Transistor Conference 2013(ITC2013)         
March 1-2, 2013,The University of Tokyo, Tokyo, Japan

Improvement in Characteristic Variability of Thin Film Transistors Using Grain Growth Control by Micro Thermal Plasma Jet Irradiation to Amorphous Silicon Strips and CMOS Circuit Operation at Supply Voltage of 5V